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比利时微电子中心(IMEC)Xiaoping Shi 3月15日来校讲学


  应机电工程学院的邀请,比利时微电子中心(IMEC)资深研究员 Xiaoping Shi将于315日来js金沙所有网址讲学,欢迎全校师生踊跃参加。学术报告具体安排如下:
  学术报告题目:Cleanroom Technology

内容摘要:Cleanroom is widely applied in many fields, e.g. micro-electronics industry, bio-pharmaceutical industry etc. In this talk, the author will first review the evolution of the cleanroom technology: the evolution of cleanroom classification and cleanroom concepts & structures, etc. Furthermore, with an example in microelectronics industry, the author will address the standard procedure how to design and realize a cleanroom.

人:Xiaoping Shi
  时
间:2012315日(周四)下午17:00
  地 点:金鸡岭校区F3

概况:Xiaoping Shi has been working in the field of semiconductors for more than 20 years. He is currently working as a senior scientist at imec in Belgium. Next to his mainfield of expertise, i.e. oxidation, CVD and ALD development for example for new HiK materials for CMOS, he is at present also exploring other fields like silicon nanowire oxidation, new materials for RRAM application etc. Before joining imec in 2001, he worked for BLL Microelectronics in US and the Netherlands for 8 years and the Institute of Semiconductors of Chinese Academy of Sciences in China for 2 years. He has authored or co-authored more than 60 papers in different journals and conference proceedings in the area of semiconductor processes and fabrication, and was invited for presentations in international conferneces. He also serves as a co-chair for Thin Film symposium of CSTIC-2012 conference in Shanghai.


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